Atomistic prediction on the configuration- and temperature-dependent dielectric constant of Be_0.25Mg_0.75O superlattice as a high-κ dielectric layer

Gyuseung Han^1,2, In Won Yeu¹, Kun Hee Ye^1,2, Seung-Cheol Lee³, Cheol Seong Hwang^*,2, and Jung-Hae Choi^*,1

¹Center for Electronic Materials, Korea Institute of Science and Technology, Seoul 02792, Korea
²Department of Materials Science and Engineering and Inter-University Semiconductor Research Center, Seoul National University, Seoul 08826, Korea
³Indo-Korea Science and Technology Center, Bengaluru, 560065, India

Figure S4

Animations for atomic motions in phonon modes with imaginary frequency at Γ point of HZ and HA.

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